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Jul 27, 2026

China Reportedly Begins Producing Homegrown Immersion DUV Lithography Machines

China has reportedly begun manufacturing domestically developed immersion deep ultraviolet (DUV) lithography machines, a key chipmaking tool long dominated by Dutch supplier ASML, as it seeks to reduce reliance on foreign semiconductor technology.

Jul 27, 2026·9 sources

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Top claims

▪Semiconductor Manufacturing International Corp has been trialing Shanghai Yuliangsheng Technology's immersion DUV tool since September 2025, aiming for active mass production as early as 2027
▪Shanghai Yuliangsheng Technology's immersion DUV lithography machine is designed to handle 28 nm-class chip processes using single exposure
▪The report on China's domestic DUV production also weighed on chip-equipment shares, with BE Semiconductor Industries tumbling about 8.5% and Soitec falling 5%

Subtopics

China tech & industrial strategy1 China-United States relations1 Global supply chains1 Semiconductor manufacturing1

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