US Raises Concerns with ASML Over Possible Chinese Access to Advanced EUV Chipmaking Equipment

Jun 19, 2026

U.S. Commerce Secretary Howard Lutnick has raised concerns with Dutch chip-equipment giant ASML that its advanced EUV lithography machine may have reached China in violation of export controls. ASML denies ever shipping the bus-sized tool, essential for making advanced chips, or its key components to China. The Dutch government affirmed its strict licensing policy amid ongoing U.S. efforts to curb China's semiconductor ambitions.

US concerns ASML EUV access

▪ASML's most advanced EUV systems are roughly the size of a school bus and weigh 180 tons.
▪The US concern is that an EUV machine may have reached China in violation of US-led export restrictions.
▪EUV systems are used by firms like Taiwan Semiconductor Manufacturing Co. to make processors for companies such as Nvidia Corp. and Apple Inc.
▪US Commerce Secretary Howard Lutnick expressed concerns to ASML leaders that one of the company's EUV machines may have reached China.

ASML denies China shipments

▪ASML also stated it has not shipped any component, module, or equipment specifically designed for use in an EUV machine to China.
▪ASML stated it has never shipped an extreme ultraviolet (EUV) lithography machine to China.

Export compliance enforcement

▪ASML has refuted allegations of non-compliance with export controls concerning China and says it adjusts its business to comply with new rules.
▪ASML has never been permitted to ship EUV systems to China because of curbs imposed during the first Trump administration.

Dutch semiconductor export controls

▪The Dutch government requires a license for all specified semiconductor equipment, components, and technology, and enforces this policy strictly.
▪The Dutch Ministry of Foreign Affairs stated its export rules are based on the European Dual-Use Regulation and additional national measures.

US semiconductor export restrictions

▪In April, the U.S. proposed a law requiring allies to align with its export controls to curb China's ability to make advanced semiconductors.
▪The proposed US legislation specifically named equipment manufactured by ASML.

Chinese EUV prototype development

▪The Chinese prototype was reportedly built by a team that included former ASML engineers in an effort described as China's 'Manhattan Project'.
▪Chinese scientists have reportedly developed a prototype of an EUV machine.